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Metal HeaterBUSINESS

Metal Heater

1. Heater Block

DESCRIPTION	P/N	SIZE	PROCESS
Heater Block 150mm	19-00155-01 19-032015-01 ETC	6"	PE-OXIDE PE-TEOS Nitride Oxide PE-CVD
Heater Block 200mm	19-00154-00 19-024227-01 ETC	8"

2. L/L Pre-Heater

DESCRIPTION	P/N	SIZE	PROCESS
VECTOR Pre-heater (Oring Type)	02-146672-00	12"	PE-CVD
VECTOR Pre-heater (New Type)	02-265257-00	12"

3. ALTUS Pedestal

DESCRIPTION	P/N	SIZE	PROCESS
ALTUS Pedestal 300mm	02-292391-00 16-377679-00 ETC	12"	Metal-CVD-Q Cu
ALTUS Pedestal 200mm	02-033395-01 02-033134-01 ETC	8"

4. VECTOR Pedestal Thin

DESCRIPTION	P/N	SIZE	PROCESS
VECTOR Process Pedestal Thin 300mm	02-364187-00 02-373416-00	12"	PE-CVD